Last edited by Bralkis
Sunday, May 10, 2020 | History

3 edition of Antireflecting-chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems found in the catalog.

Antireflecting-chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems

Antireflecting-chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems

standard reference materials

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  • 8 Currently reading

Published by U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology, Order from National Technical Information Service in Gaithersburg, MD, [Springfield, VA .
Written in English

    Subjects:
  • Microscopes -- Calibration -- Standards.,
  • Integrated circuits -- Masks -- Measurement.,
  • Chromium -- Spectra -- Standards.

  • Edition Notes

    Other titlesStandard reference materials., Antireflecting chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems., Standard reference materials.
    StatementCarol F. Vezzetti, Ruth N. Varner, James E. Potzick.
    SeriesNIST special publication -- 260-119.
    ContributionsVarner, Ruth N., Potzick, James E., National Institute of Standards and Technology (U.S.)
    The Physical Object
    FormatMicroform
    Pagination1 v.
    ID Numbers
    Open LibraryOL16948916M


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Antireflecting-chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems Download PDF EPUB FB2